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MEMS

Features:

 

Full in-house design ability

 

Cavity packaging structure

 

Excellent thermal performance

 

Special package design

JEDEC standard outlines

 
 
 
 

Application:

 

Communication

 

Consumer product, e.g.: microphone

 

Tri-axis Accelerometer

 

Air pressure sensor

 

Micro relay


Process flow of MEMS with BOM

Process flow
Material
Wafer IQC
 
Wafer Mount
 
Wafer Saw
 
2nd Optical Inspection
 
Layer1 Die Bond
Copper L/F, Epoxy
Layer1 Die Bond Cure
 
Layer2 Die Bond
Epoxy
Layer2 Die Bond Cure
 
Wire Bond
Gold wire
3rd Optical Inspection
 
Die Coat
Epoxy
Die Coat cure
 
Lid Seal
Lid
Marking
 
Trimming
 
Plating
Sn

Forming

 
Lead scan
 
FVI
 
Packing
 

MEMS Reliability Test

Moisture Sensitivity Test: JEDEC Level 3 (30 85%RH 168hrs)
Temperature Cycle Test: JESD22-A104C (-65/5min~150/5min  500cycles)
Pressure Cooker: JESD22-A102-C (121 2 atm. 100%RH 168hrs)
High Temperature Storage Life: JESD22-A103C (150 1000hrs)

Note: Many to come, please contact us for details.

Revised date Q2 2007

 


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